Stitching-loss-tolerant SiN waveguides on glass for panel-level optical interconnects, providing high tolerance to i-line stepper misalignment through tapered designs.
Abstract
In this Letter, we propose a stitching-loss-tolerant silicon nitride (SiN) waveguide structure that alleviates optical loss caused by reticle stitching, which inevitably arises in i-line stepper lithography suitable for low-cost, large-area fabrication. At a wavelength of 1310nm, the measured stitching loss of straight waveguides is 0.105dB/interface. In contrast, tapered waveguides with stitching widths (Ws) of 2µm and 3.5µm demonstrate significantly reduced losses of 0.0678 and 0.0213dB/interface. These results pave the way for glass-based panel-level optical interconnect enabled by cost-effective fabrication, addressing a critical bottleneck in next-generation optical packaging. [Link to Journal website (Optics Letters)]
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