차세대 Co-packaged Optics용 유리 기판 위 실리콘 나이트라이드 집적 광학

Highlight

• We proposed a SiN-on-Glass (SING) platform as a scalable solution for high-density optical redistribution layers (RDL) in next-generation CPO.
• We achieved a peak coupling efficiency of -5.1 dB on glass substrates by integrating a bottom metal reflector to minimize substrate leakage.
• We demonstrated high-density routing with a 100 μm bend radius, significantly outperforming conventional glass-based waveguide technologies.
• We realized the platform’s reliability for wafer-scale expansion through stitching error analysis and 106-Gbps PAM-4 high-speed signal transmission.

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